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Functional nanostructures using highly ordered anodic porous alumina
Hideki Masuda
Tokyo Metropolitan University, Kanagawa Academy of Science and Technology
1-1 Minamiosawa, Hachioji, Tokyo 192-03, Japan
E-mail: masuda-hideki@c.metro-u.ac.jp
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Fabrication of highly ordered hole-array architectures with uniform-sized holes ranging from the submicron
to nanometer range has recently attracted increasing interest because of demands for the development of various
types of functional devices. Anodic porous alumina, which is formed by anodization of Al in appropriate acidic
solutions, is a typical self-ordered nanohole-array material. This material is one of promising candidates for
the starting structure of nanofabrication due to its unique fine geometrical structures. We have been studying
the fabrication processes of highly ordered holes array structures of anodic porous alumina and their application
to various functional devices.
In the present report, we describe a recent progress of fabrication of ordered nanostructures using highly
ordered anodic porous alumina.
References
[1] H. Masuda and K. Fukuda, Science 268, 146 (1995).
[2] H. Masuda and M. Sato, Jpn. J. Appl. Phys. 35, L126 (1996).
[3] H. Masuda et al., Appl. Phys. Lett. 71, 2770 (1997).
[4] T. Yanagishita, K. Nishio, and H. Masuda, Adv. Mater. 17, 2241 (2006).
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